Manufacturing and evaluation of surface roughness specimens

Calibration specimens are fundamental materials to assure the traceability of surface profilometer. Therefore, in this study, the manufacturing system was developed to disseminate calibration specimens. In the previous paper, we reported that the system was newly modified to make it more precise. In this paper, we report on the development of calibration specimens with chirp (sweep) forms, circular-arc grooves array forms and other forms. The purposes on the circular-arc groove array specimens (Type B2 and C4) are to calibrate the motif parameters R, AR, W, AW etc., the P-parameters PSm and Pa and the R-parameters RSm. The main purposes on the proposed chirp form specimens are to check easily and quickly characteristic and capability of digital Gaussian filter and frequency response characteristic specification of stylus instruments. On the chirp form specimens mainly manufactured, the wavelength of the signal varies linearly and logarithmically over the lateral direction x (Types of chirp include linear, quadratic, logarithmic, exponential chirp etc.). These specimens were manufactured by single point diamond tools, which tip radius is finite radius. In this study, the diamond tools with around 20 u m radius was used, the tool locus was mathematically corrected to accurately manufacture arbitrary form by geometrical analysis.