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Nanostructure change near surface region exmined by grazing-incidence small-angle scattering
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- Okuda Hiroshi
- Department of materials science and engineering, Kyoto University
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- Sakurai Shin-ichi
- Kyoto Institute of Technology
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- Shimizu Nobutaka
- Photon Factory, KEK
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- Igarashi Noriyuki
- Photon Factory, KEK
Bibliographic Information
- Other Title
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- GISAXS法による表面近傍の構造変化の検討
Description
表面からサブミクロン程度以内での相分離などの自発的に形成されるナノ組織の評価に有効なGISAXS法による解析例について、特にここ数年で適用例の増えてきた軟X線（TenderX線）領域を利用した深さ分解能の向上を利用した結果を中心に報告する。 <br>
Journal
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- Abstract of annual meeting of the Surface Science of Japan
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Abstract of annual meeting of the Surface Science of Japan 36 (0), 227-, 2016
The Japan Society of Vacuum and Surface Science
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Details 詳細情報について
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- CRID
- 1390282680654596736
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- NII Article ID
- 130005175574
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed