Plasma Chemical Vaporization Machining with a Pipe Electrode for Optical Fabrication: a Review
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- Takino Hideo
- Lens Engineering Development Department, Nikon Corporation
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Abstract
Plasma chemical vaporization machining (CVM) has been proposed as a high-precision chemical shaping method, which uses rf plasma generated in the proximity of an electrode in an atmospheric environment. Based on the principle of plasma CVM, a computer numerically controlled plasma CVM device with a pipe electrode was proposed for optical fabrication. This paper reviews the plasma CVM device, its removal characteristics, and the fabrication results of glass optics by use of the device
Journal
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- International Journal of Electrical Machining
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International Journal of Electrical Machining 17 (0), 1-6, 2012
The Japan Society of Electrical Machining Engineers
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Keywords
Details 詳細情報について
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- CRID
- 1390282680733159680
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- NII Article ID
- 10030521458
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- NII Book ID
- AN10564586
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- ISSN
- 21885117
- 13417908
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- NDL BIB ID
- 028572880
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed