J042034 Cuナノワイヤを用いた超高周波表面波共振の励起と分散関係の解析([J04203]超音波計測・解析法の新展開(3))

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  • J042034 Excitation of Ultrahigh-Frequency Surface Acoustic Wave Resonance with Cu Nanowires and Its Dispersion Characteristics

抄録

We present an ultrahigh frequency surface acoustic wave (SAW) resonance phenomenon. We fabricated Cu nanowire specimen on (100) Si and glass substrate, and generate vibrations related with nanowires by picosecond ultrasound method. We succeeded in observing high (70-80 GHz) and low (-15GHz) frequency vibrations. They are identified to be thickness resonance of nanowires and SAW resonances, respectively. By changing the wire spacing, we observed dispersion relationship of the ultrahigh SAW and compared them with calculations with the effective mass density by considering the volume fraction of nanowire. This calculation showed good agreements with the measurements when the penetration depth of SAW energy is 6% of wavelength.

収録刊行物

  • 年次大会

    年次大会 2011 (0), _J042034-1-_J042034-3, 2011

    一般社団法人 日本機械学会

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