J114011 ポリイミドダイアフラムで封止した磁性流体によって駆動するMEMSアクチュエータの基本特性([J114-01]次世代アクチュエータシステム(1))

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書誌事項

タイトル別名
  • J114011 Fundamental characteristics of a MEMS Actuator Driven by Magnetic Fluid Enclosed with Polyimide Diaphragms

説明

A MEMS actuator using a magnetic fluid enclosed with polyimide (PI) diaphragms is proposed. The actuator produces a large displacement and force thanks to its structure in which a magnetic fluid(MF) is confined between two thin-film PI diaphragms (diameter: 5 mm) fabricated on two silicon substrates. The two substrates with diaphragms are glued together by sandwiching a polyester sheet as a sealing material for MF. The thickness of the diaphragms is 8.5μn so that they can deflect greatly. The magnetic fluid inserted between the two diaphragms is composed of magnetite and isoparaffin. The diaphragm unit (containing the magnetic fluid) is deflected by applying an external magnetic field to it with a magnet coil. Response times and displacements of the diaphragms were measured when a magnetic field was applied. Under an applied voltage of 40V(40mT), the diaphragm unit could produce displacements of 15μm at the diaphragm center. It is concluded from these experimental results that the proposed actuator is applicable to MEMS devices such as micro pumps and give another example here.

収録刊行物

  • 年次大会

    年次大会 2013 (0), _J114011-1-_J114011-4, 2013

    一般社団法人 日本機械学会

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