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Synthesis of Diamond by Microwave Plasma under High Pressure : Preparation of films and Deposition Process
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- YAMANAKA Hirofumi
- Ehime University
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- HATSUDA Kazuyoshi
- Mazda Motor Corporation
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- TOYOTA Hiromichi
- Ehime University
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- YAGI Hidetsugu
- Ehime University
Bibliographic Information
- Other Title
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- 511 高圧力マイクロ波プラズマによるダイヤモンド膜生成に関する研究 : 膜生成および生成プロセス
Journal
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- The Proceedings of Conference of Chugoku-Shikoku Branch
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The Proceedings of Conference of Chugoku-Shikoku Branch 2002 (0), 171-172, 2002
The Japan Society of Mechanical Engineers
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Details 詳細情報について
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- CRID
- 1390282680838333952
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- NII Article ID
- 110002480927
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- ISSN
- 24242764
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
- OpenAIRE