Composite Material of Gas Permeable Mold for Nanoimprint Microfabrication

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  • ZHOU Ziqi
    Toyama Prefectural Univ., Dept. of Mechanical System Engineering
  • NAKAJIMA Shinya
    Toyama Prefectural Univ., Dept. of Mechanical System Engineering
  • TAKAMATSU Soichiro
    Toyama Prefectural Univ., Dept. of Mechanical System Engineering
  • HANABATA Makoto
    Toyama Prefectural Univ., Dept. of Mechanical System Engineering
  • TAKEI Satoshi
    Toyama Prefectural Univ., Dept. of Mechanical System Engineering

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  • ナノインプリント微細加工用ガス透過性金型複合材料

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