Development of Impact Sensor Using Silicon Strain Gauge

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  • ISOBE Koki
    Dept. of Finemechanics, Graduate School of Engineering, Tohoku University
  • KATO Takeru
    Dept. of Finemechanics, Graduate School of Engineering, Tohoku University
  • SUZUKI Ken
    Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku University
  • MIURA Hideo
    Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku University

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Other Title
  • Siひずみゲージ応用衝撃力センサの試作

Abstract

<p>A strain sensor which can monitor the change of local stress distribution in 3-D stacked structures was developed by applying the piezoresistive effect of single-crystalline silicon. The sensor was embedded in a silicon chip, and it measured the impact effect for the chip during the manufacturing and operating process of electronic products. The strain dependence of the electrical conductivity of the sensor was evaluated. Fabricated sensor showed liner voltage-current characteristics and the gauge factor of about 100.</p>

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