529 フライカットによる単結晶硬脆材料の超精密加工(超精密加工・マイクロ・ナノ加工)

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  • 529 Ultraprecision Machining of Single Crystal Hard and Brittle Material by Fly Cutting

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In this report, ultra precision cutting of hard and brittle crystal materials with fly cutting which is one of the interrupted cutting was newly proposed and tested. In this experiments, single crystal germanium was cut with proposed diamond fly cutting, to study the influence of crystal orientation and the change of critical undeformed chip thickness in 0, -15, -30, -40 degrees of the tool rake angle. From the experimental results, critical undeformed chip thickness was largest in -30 degrees of the tool rake angle, and the undeformed chip thickness was 235 nm which is about 4 times compared with the conventional turning.

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