レーザプラズマ誘起蛍光を用いたガス圧力の高感度計測

平井 秀一郎, 高城 敏美, 久保 方宏, 中野 康正

doi:10.1299/kikaib.59.3113

レーザプラズマ誘起蛍光を用いたガス圧力の高感度計測

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書誌事項

タイトル別名

High-Resolution Measurement of Gas Pressure Using Laser-Induced Plasma Fluorescence.
レーザプラズマユウキケイコウオモチイタガスアツリョクノコウ

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説明

A highly-sensitive technique for gas pressure measurement has been developed using laser-induced plasma fluorescence. ArF laser light of 193nm is focused into CF₃I/Aγ gas mixture, where Ar is ionized by the 3-photon absorption. A highly pressure-dependent fluorescence intensity is obtained which originates from the 3-body reaction of Aγ⁺₂, Aγ₂ and Aγ₂ with two Ar atoms. Pressure fluctuation in a turbulent jet is measured applying the present method. Pressure fluctuation beyond the instrumental noise level can be measured, where the instrumental noise level is 0.5 percent of the total pressure.