Experimental Study of the Pumping Mechanism of a Dry-Scroll Vacuum Pump.
Bibliographic Information
- Other Title
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- ドライ式スクロール真空ポンプの排気機構に関する実験的研究
- ドライシキ スクロール シンクウ ポンプ ノ ハイキ キコウ ニ カンスル ジ
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Abstract
The validity of the theory concerning the pumping performance of a dry-scroll vacuum pump proposed by the authors has been examined using the following three experiments, (1) the separation of the direct effect of orbiting speed on the ultimate pressure from the effect of clearance change with temperature change accompanying a change in orbiting speed, (2) the measurement of local pressure in the outermost pocket, (3) the measurement of the pumping speed throughout the working pressure range. Comparison of the experimental results with the theoretical predictions confirms the validity of the theoretical treatment.
Journal
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- TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B
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TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B 63 (607), 957-963, 1997
The Japan Society of Mechanical Engineers
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Keywords
Details 詳細情報について
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- CRID
- 1390282680870729728
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- NII Article ID
- 130004222534
- 110002396272
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- NII Book ID
- AN00187441
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- ISSN
- 18848346
- 03875016
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- NDL BIB ID
- 4171250
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed
