書誌事項
- タイトル別名
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- Growth of Bulk GaN Single Crystals by the Solution Growth Method under High-Pressure(<Special Issue>Science and Technology in Crystal Growth)
- 高圧溶液成長法によるバルクGaN単結晶の成長
- コウアツ ヨウエキ セイチョウホウ ニ ヨル バルク GaN タンケッショウ ノ セイチョウ
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抄録
The growth of bulk GaN single crystals by the high-pressure solution growth method under "the Light for the 21st Century" Japanese national project has been carried out using a high-pressure furnace. It was found that the rate of increase of N_2 pressure affected the size of a GaN single crystal. GaN single crystals with an area of about 120 mm^2 were obtained at a rate less than 49 MPa/h. The maximum size of single crystals grown at 1475℃ under a N_2 pressure of 1000 MPa was over 20 mm in diameter. The FWHM of rocking curve measured for (0002) X-ray diffraction peak was 60-120 arcsec and (101^^-1) X-ray diffraction peak was 30-60 arcsec. The dislocation density less than 10^5 cm^<-2> was obtained by TEM image and CL image observations.
収録刊行物
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- 日本結晶成長学会誌
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日本結晶成長学会誌 29 (5), 439-444, 2002
日本結晶成長学会
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詳細情報 詳細情報について
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- CRID
- 1390282680874282240
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- NII論文ID
- 110002715710
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- NII書誌ID
- AN00188386
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- ISSN
- 21878366
- 03856275
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- NDL書誌ID
- 6433484
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可