C17 微細塑性加工による単結晶金属の結晶構造の変化(OS-12 ナノ加工と表面機能(4))

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  • C17 Variations of crystalline structure of a single crystal metal by nano plastic forming

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In this paper, the deformation mechanism is examined by nano forming of a single crystalline copper and aluminum specimen. And knife edge tool was indented into crystalline copper or aluminum specimen of various crystal orientations. And change of crystal orientation was measured by EBSD analysis. Spin vectors of crystal rotation were calculated by tensor analysis based on the EBSD data. Results revealed that most of the spin vectors indicates [100] crystal orientation around an indent groove. Next, single crystalline specimen was annealed after nano forming. FIB observation revealed an indent groove. This result indicates controllability of crystalline structure by combination of nano plastic forming and annealing. And the changes of crystal structure were examined.

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