MP-45 Measurement Method for Transformation Temperature of Shape Memory Alloys Using Thin Film Library

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  • MP-45 薄膜ライブラリを用いた形状記憶合金の変態温度測定法(ポスターセッション)

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Thin film shape memory materials including shape memory alloys (SMAs) have the advantages of high recovery stress and strain, therefore they are promising materials for MEMS actuators. To apply SMAs to MEMS actuators, it's important to characterize the material properties such as phase transformations and thermal hysteresis, because the properties may limit the response speed and the operating temperature range of the actuators. For high-throughput characterization and development of novel SMAs, a combinatorial approach is focused on. In this paper, in measurement method of phase transformations using thermography which we have proposed, we attempted to measure the transformation temperatures of small SMA samples of thin film library and verified the applicability of the combinatorial approach to the measurement method of phase transformations using thermography. As results, we achieved to measure the transformation temperatures of considerable samples on the thin film library and showed the potential for the applicability of the combinatorial approach to the proposed method.

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