MNM-3B-1 Novel Micro Stereo Lithography, Restrained Resin Surface by Glass and One Direction Scanning

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  • MNM-3B-1 1次元規制液面光造形法の開発(セッション 3B 情報・精密機器におけるマイクロ・ナノテクノロジー2)

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Targeting to manufacture of micro fluidic chip masters, the feasibility of the novel micro stereo lithography method which featured 'restrained resin surface by glass and one direction scanning' was studied. We have got better results by new method than by currently method. With the great help of such advantages, we succeeded in making two-depth sample whose minimum channel width was 50 μm at the height of 20 μm.

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