143 Control of the Wide Variation of Mechanical Properties of Electroplated Copper Thin Films Used for Advance Semiconductor Devices
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- Gotoh Masaru
- Department of Nanomechanics, Graduate School of Engineering, Tohoku Univ.
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- Suzuki Ken
- Department of Nanomechanics, Graduate School of Engineering, Tohoku Univ.
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- Miura Hideo
- Department of Nanomechanics, Graduate School of Engineering, Tohoku Univ.
Bibliographic Information
- Other Title
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- 143 次世代半導体配線用めっき銅薄膜機械特性分布広がり制御因子の解明
Journal
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- The Proceedings of Conference of Tohoku Branch
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The Proceedings of Conference of Tohoku Branch 2016.51 (0), 83-84, 2016
The Japan Society of Mechanical Engineers
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Details 詳細情報について
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- CRID
- 1390282680919779328
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- NII Article ID
- 110010044813
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- ISSN
- 24242713
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles