188 An optical sensor for measurement of angular motions of a planar motion stage

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  • MUTO Hiroshi
    Nano-Metrology and Control Lab, Department of Nanomechanics, Tohoku University
  • SAITO Yusuke
    Nano-Metrology and Control Lab, Department of Nanomechanics, Tohoku University
  • ARAI Yoshikazu
    Nano-Metrology and Control Lab, Department of Nanomechanics, Tohoku University
  • GAO Wei
    Nano-Metrology and Control Lab, Department of Nanomechanics, Tohoku University

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  • 188 平面ステージ姿勢計測用光学式角度センサに関する研究(生産加工・工作機械II,一般講演)

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