Study on Precision Grinding of Micro Aspherical Surface : Proposal and the accuracy evaluation of grinding point fixation control method in diagonal axis grinding method

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  • マイクロ非球面研削に関する研究 : クロス方式の斜軸研削における研削点固定制御方式の提案とその精度評価(S58 研削加工と砥粒加工,S58 研削加工と砥粒加工)

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This paper deals with a precision grinding of micro axis-symmetric aspherical surface by use of a resinoid bonded diamond wheel. Ultra-precision grinding system of axis-symmetric aspherical surface was developed. In this study, a grinding point fixation control method on 45 degrees diagonal axis grinding method was proposed and its form deviation was evaluated. In this system, a resinoid bonded diamond wheel was scanned on the workpiece surface 3-dimentionally controlled with Inm resolution by linear scale feedback system.

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