3315 外部駆動型マイクロポンプの共振特性評価(J26-3 マイクロメカトロニクス(3),J26 マイクロメカトロニクス)

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  • 3315 Evaluation of oscillating characteristics for external-driving micropump

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To evaluate the influence of miniaturization on resonance characteristics of extertnally driven micropumps, the modal analyses for systems consisted of an actuator and microchannel including water was carried out. Scale factor defined in this paper quantified the influence of miniaturizing. When a cantilever-typed actuator was miniaturized, it became clear that the oscillation at a high resonant frequency negatively influence on the pump performance (especially when the scale factor is larger than 100 m-1). The influence of additional mass effect of water was negligible for the scale range in this study. When thin-film actuator was used, negative effect observed in cantilever actuator was not emerged. However, additional mass effect of water produced up to a 67% decrease in resonant frequency. We pointed out the necessity to take the additional mass effect of water into consideration when pump is designed.

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