T0302-1-1 MEMS共振デバイスの低サイクル破壊試験(マイクロ・ナノ力学とシステム設計論(1))

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  • T0302-1-1 Low cycle fracture test of a MEMS resonator

説明

Low cycle fatigue fracture was investigated using the free oscillation of a resonating test device. Rapid rise of the vibration amplitude provides fast fracture in the range of 100 ms. Rise rate of the vibration amplitude could be controlled by the gain setteing of the driving circuit. The results were analyzed based on the crack propagation law assuming linear stress increase. Fatigue lives obtained by this low-cycle fatigue test agreed well with the extraporation of the stress-life line fitted for the results of high-cycle fatigue test.

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