F-0201 ナノスクラッチ法による硬質薄膜の密着性評価について(S34-1 トライボロジー現象のその場観察)(S34 トライボロジー現象の新しい計測・観察法)

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  • F-0201 Ability of a nano-scratch method to evaluate the adhesiveness of hard and thin coatings

説明

This paper describes an evaluation method for the adhesiveness of hard and thin coatings by using nano-scratch testing. Nano-scratch tests were carried out by employing a nano-indentation system using the Berkovich indenter-tip and the PVD-TiN coatings. We tried to measure the contact stiffness and the lateral force continuously with the controlled load and displacement of the indenter. Experimental results showed that the scratch direction caused the different peeling off behavior of the TiN coatings. The continuous stiffness data, however, gave us enough quality to analyze the contact conditions. Technical problems were discussed to evaluate the adhesiveness of thin and hard coatings.

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