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Non-Evaporable Getter (NEG) Coating Using Titanium and Palladium Vacuum Sublimation
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- MIYAZAWA Tetsuya
- SOKENDAI
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- TOBISHIMA Kensuke
- Hirosaki University
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- KATO Hiroo
- Hirosaki University
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- KURIHARA Masashi
- Yokohama National University
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- OHNO Shinya
- Yokohama National University
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- KIKUCHI Takashi
- KEK
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- MASE Kazuhiko
- SOKENDAI KEK
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Description
<p>We have developed a new non-evaporable getter (NEG) coating using titanium and palladium vacuum sublimation. The inner wall of the test chamber was coated with a 1-µm Ti thin film using the Ti sublimation pumps under a vacuum of 6.5×10−6 Pa (Ti-coated chamber). This chamber was then coated with a 10-nm Pd thin film using the Pd sublimation filament under a vacuum of 2.4×10−4 Pa (Pd/Ti-coated chamber). The uncoated, Ti-coated, and Pd/Ti-coated chambers were baked for 6 h at a maximum temperature of 185℃. Five hours after closing the valve, the pressures in the Pd/Ti-coated chamber were about 1.4×10−6 Pa even after six heating–venting cycles. The relatively low activation temperature was attributed to the low concentration of oxygen in the Pd/Ti thin films. The Pd/Ti coating can be used for vacuum systems that are frequently vented.</p>
Journal
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- Vacuum and Surface Science
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Vacuum and Surface Science 61 (4), 227-235, 2018
The Japan Society of Vacuum and Surface Science
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Details 詳細情報について
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- CRID
- 1390282681102821632
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- NII Article ID
- 130006688239
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- NII Book ID
- AA12808657
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- ISSN
- 24335843
- 24335835
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- NDL BIB ID
- 028996236
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL Search
- Crossref
- CiNii Articles
- OpenAIRE
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- Abstract License Flag
- Disallowed