Polishing simulation : Comparison of fluctuations between (100) face and (110) face
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- Hasegawa Yutaka
- Chubu Univ.
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- Miyazima Sasuke
- Chubu Univ.
Bibliographic Information
- Other Title
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- 研磨シミュレーション : (100)面と(110)面のゆらぎの比較
Journal
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- Meeting Abstracts of the Physical Society of Japan
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Meeting Abstracts of the Physical Society of Japan 1995.3 (0), 621-, 1995
The Physical Society of Japan
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Details 詳細情報について
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- CRID
- 1390282681140247296
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- NII Article ID
- 110002057964
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- ISSN
- 24331171
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles