The Analysis of Chemical State of Obliquely Evaporated Co-Ni-O Film by Auger Electron Spectroscopy.

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  • Kawano Mariko
    Engineering Research Laboratory, Hitachi Maxell, Ltd., 6–20–1 Kinunodai, Yawara–mura, Tsukuba–gun, Ibaraki 300–24, Japan
  • Yano Akira
    Engineering Research Laboratory, Hitachi Maxell, Ltd., 6–20–1 Kinunodai, Yawara–mura, Tsukuba–gun, Ibaraki 300–24, Japan
  • Mizumura Tetsuo
    Engineering Research Laboratory, Hitachi Maxell, Ltd., 6–20–1 Kinunodai, Yawara–mura, Tsukuba–gun, Ibaraki 300–24, Japan

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Obliquely evaporated Co-O and Co-Ni-O films show different coercivity dependences on saturation magnetization. To clarify the origin of this difference, we introduced numerical analysis in Auger electron spectroscopy and analyzed the chemical state (metal or oxide) of the Co-Ni-O magnetic layer. In the Co-Ni-O magnetic layer, cobalt was oxidized preferentially compared to nickel. Therefore the compositional ratio of metallic Co to Ni in the magnetic layer was assumed to be different from that of source material. This preferential oxidation of cobalt was considered to be the cause of the difference in coercivi ty dependences on saturation magnetization between Co-O and Co-Ni-O.

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