Theory on High-Vacuum Planar Magnetron Discharge.

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  • Miura Tsutomu
    Department of Electrical Engineering, Faculty of Engineering, Science University of Tokyo, 1–3 Kagurazaka, Shinjuku–ku, Tokyo 162, Japan
  • Asakaki Tatsuo
    Department of Electrical Engineering, Faculty of Engineering, Science University of Tokyo, 1–3 Kagurazaka, Shinjuku–ku, Tokyo 162, Japan

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  • Theory on High-Vacuum Planar Magnetron

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Abstract

A theory on high-vacuum planar magnetron discharge for the wide range of E a/B A>2.0× 106/n V/(m· T) has been developed (E a: magnitude of the average electric field strength; B A: magnetic flux density at the anode; n: power index of the potential distribution). The relevant parameters on the ionizing collisions and the geometrical factors from the cross section of erosion are incorporated in the theory. The discharge current I becomes a function of E a/B A with the parameter of B A. With E a/B A fixed, I∝ B A is shown. The optimum E a/B A ratio gives the local maximum of I. This ratio depends on n and the power index of magnetic flux density distribution N. In the range of Ea/BA≥ 2.3× 107/n V/(m· T), function I becomes the simple form I∝ E aMB A1-M, where M=N/(n-1+N). Experimental work has also been carried out.

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