Morphology Change of Octahedral Oxide Precipitates in Czochralski Silicon Wafers Stretched by Tension.
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- Ojima Kozo
- National Defense Academy, Department of Mathematics and Physics, Yokosuka 239-8686, Japan
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- Sakai Kazufumi
- National Defense Academy, Department of Mathematics and Physics, Yokosuka 239-8686, Japan
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- Yamagami Takehisa
- National Defense Academy, Department of Mathematics and Physics, Yokosuka 239-8686, Japan
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説明
Alterations in the morphology of thermally induced oxide precipitates have been studied by transmission electron microscopy in a Czochralski silicon wafer deformed by tension at 850°C and 950°C. Precipitates with complex shapes are frequently observed in specimens deformed at 950°C. Some octahedral oxide precipitates are observed to expand at the vertices of the square shape in the plan view in a specimen heat-treated at 1050°C for 8 h after deformation at 950°C. Precipitates grow on residual dislocations around octahedral oxide precipitates. These observations suggest that a large number of vacancies form in the vicinity of octahedral oxide precipitates through interaction with bypassing dislocations.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 39 (10), 5723-5726, 2000
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390282681228227328
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- NII論文ID
- 110004055699
- 130004526698
- 210000047873
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 5547025
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
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- 抄録ライセンスフラグ
- 使用不可