Accurate Measurement of Spherical and Astigmatic Aberrations by a Phase Shift Grating Reticle.
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- Nomura Hiroshi
- Process & Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan
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A new grating structure is proposed for measuring aberrations in lithography lenses. The grating structure on a reticle comprising opaque lines, naked lines and π/2-phase-shifted grooves with their width ratio equal to 2/1/1 has a property such that either of the two first-order diffracted rays disappears entirely. The other first-order ray interferes with the zeroth-order ray to form tilted standing waves. Since a resist pattern of the grating is formed on top lines or valley lines of the standing waves, it moves with perfect linearity upon defocus. In this paper the quantitative metrology of even aberrations in a lithography lens is described along with a demonstration of an application of the grating reticle for a krypton fluoride excimer laser scanner with a numerical aperture (NA) of 0.73. Variation of the grating period along with a small-opening stopper inserted into the illuminator enlarge the measurable range of the pupil radius. The measurement technique described in this paper achieves high accuracy which is sufficient for small aberration lenses in state-of-the-art scanners.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 40 (11), 6316-6322, 2001
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390282681228383232
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- NII論文ID
- 210000050205
- 110004043450
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 5985895
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 使用不可