Evaporation of Silver during Chemical Vapor Deposition Process for YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7</sub> and its Effect on Microstructure

  • Ma Yanwei
    Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan CREST, Japan Science and Technology Corporation, Tsukuba 305-0047, Japan
  • Watanabe Kazuo
    Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan CREST, Japan Science and Technology Corporation, Tsukuba 305-0047, Japan
  • Awaji Satoshi
    Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan CREST, Japan Science and Technology Corporation, Tsukuba 305-0047, Japan
  • Motokawa Mitsuhiro
    Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan CREST, Japan Science and Technology Corporation, Tsukuba 305-0047, Japan

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タイトル別名
  • Evaporation of Silver during Chemical Vapor Deposition Process for YBa2Cu3O7 and its Effect on Microstructure.

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YBa2Cu3O7 (YBCO) films were simultaneously grown on both silver and MgO substrates by a chemical vapor deposition (CVD) technique. It is found that the transportation of silver occurs through the evaporation of silver from the silver substrate at the processing temperature of 850°C. The effect of the evaporation of silver during deposition was investigated. The silver vapor travels a distance of a few millimeters over the surface of a neighboring MgO substrate. It is also demonstrated for the first time that the presence of silver vapor causes some microstructural changes in the film grown on the MgO substrate.

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