Evaporation of Silver during Chemical Vapor Deposition Process for YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7</sub> and its Effect on Microstructure
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- Ma Yanwei
- Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan CREST, Japan Science and Technology Corporation, Tsukuba 305-0047, Japan
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- Watanabe Kazuo
- Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan CREST, Japan Science and Technology Corporation, Tsukuba 305-0047, Japan
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- Awaji Satoshi
- Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan CREST, Japan Science and Technology Corporation, Tsukuba 305-0047, Japan
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- Motokawa Mitsuhiro
- Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan CREST, Japan Science and Technology Corporation, Tsukuba 305-0047, Japan
書誌事項
- タイトル別名
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- Evaporation of Silver during Chemical Vapor Deposition Process for YBa2Cu3O7 and its Effect on Microstructure.
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抄録
YBa2Cu3O7 (YBCO) films were simultaneously grown on both silver and MgO substrates by a chemical vapor deposition (CVD) technique. It is found that the transportation of silver occurs through the evaporation of silver from the silver substrate at the processing temperature of 850°C. The effect of the evaporation of silver during deposition was investigated. The silver vapor travels a distance of a few millimeters over the surface of a neighboring MgO substrate. It is also demonstrated for the first time that the presence of silver vapor causes some microstructural changes in the film grown on the MgO substrate.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 40 (11), 6339-6343, 2001
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390282681228386944
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- NII論文ID
- 110004043456
- 210000050211
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 5985951
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可