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Low Surface Recombination Velocity on Silicon Wafer Surfaces due to Iodine-Ethanol Treatment.
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- Kurita Kazunari
- Mitsubishi Materials Silicon Corporation, R&D Center, Technology Division, 1–297 Kitabukuro–cho, Omiya, Saitama 330–0835, Japan
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- Shingyouji Takayuki
- Mitsubishi Materials Silicon Corporation, R&D Center, Technology Division, 1–297 Kitabukuro–cho, Omiya, Saitama 330–0835, Japan
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Description
We investigated the electronic passivation of a silicon surface by iodine termination. The surface recombination velocity on iodine-terminated Si(100) was less than 10 cm/s, which is better than that obtained from oxide-passivated silicon surfaces. X-ray photoelectron spectroscopy (XPS) showed that the iodine-terminated silicon surface appeared to be covered by covalent silicon iodine bonds. This surface has no surface dangling bonds to act as recombination centers. We describe a simple model for this surface coverage phenomena of Si-X where X is a monovalently bonded iodine atom. We demonstrate the use of iodine-ethanol solution as an alternative to oxidation for controlling silicon surface chemistry.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 38 (10), 5710-5714, 1999
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390282681228659456
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- NII Article ID
- 210000045843
- 110003963248
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- NII Book ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL BIB ID
- 4887425
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL Search
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed