Thomson Scattering Measurement of Electron Density and Temperature of a Microwave Plasma Produced in a Hydrogen Gas at a Moderate Pressure.

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  • Narishige Soushi
    Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
  • Suzuki Seiji
    Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
  • Bowden Mark D.
    Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
  • Uchino Kiichiro
    Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
  • Muraoka Katsunori
    Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
  • Sakoda Tadanori
    Kitakyushu National College of Technology, Kokuraminami, Kitakyushu 802-0985, Japan
  • Park Won Zoo
    School of Electrical and Electronic Engineering, Yeungnam University, Kyongsan, Kyongbuk 712-749, Korea

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Laser Thomson scattering was applied successfully for the first time to a microwave discharge plasma suitable for deposition of diamond thin film. The plasma was produced in pure hydrogen gas, but the conditions were otherwise identical to those used for diamond deposition. The local electron density and temperature at the plasma center were (3.0± 0.2)× 1017 m-3 and (1.7± 0.2) eV. Although the degree of ionization of the plasma was very low (<10-6), Thomson scattering signals could be detected clearly by using a double-monochromator which has a stray light rejection of 10-6 at the differential wavelength of \varDeltaλ=1 nm from the laser wavelength. Various checks were made to exclude the possibility of the probing laser from affecting the measured values, confirming the reliability of the measurement.

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