Thomson Scattering Measurement of Electron Density and Temperature of a Microwave Plasma Produced in a Hydrogen Gas at a Moderate Pressure.
-
- Narishige Soushi
- Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
-
- Suzuki Seiji
- Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
-
- Bowden Mark D.
- Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
-
- Uchino Kiichiro
- Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
-
- Muraoka Katsunori
- Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
-
- Sakoda Tadanori
- Kitakyushu National College of Technology, Kokuraminami, Kitakyushu 802-0985, Japan
-
- Park Won Zoo
- School of Electrical and Electronic Engineering, Yeungnam University, Kyongsan, Kyongbuk 712-749, Korea
この論文をさがす
抄録
Laser Thomson scattering was applied successfully for the first time to a microwave discharge plasma suitable for deposition of diamond thin film. The plasma was produced in pure hydrogen gas, but the conditions were otherwise identical to those used for diamond deposition. The local electron density and temperature at the plasma center were (3.0± 0.2)× 1017 m-3 and (1.7± 0.2) eV. Although the degree of ionization of the plasma was very low (<10-6), Thomson scattering signals could be detected clearly by using a double-monochromator which has a stray light rejection of 10-6 at the differential wavelength of \varDeltaλ=1 nm from the laser wavelength. Various checks were made to exclude the possibility of the probing laser from affecting the measured values, confirming the reliability of the measurement.
収録刊行物
-
- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 39 (12A), 6732-6736, 2000
The Japan Society of Applied Physics
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390282681228813696
-
- NII論文ID
- 210000048095
- 110004044497
-
- NII書誌ID
- AA10457675
-
- COI
- 1:CAS:528:DC%2BD3MXhsFKqsw%3D%3D
-
- ISSN
- 13474065
- 00214922
-
- NDL書誌ID
- 5624425
-
- 本文言語コード
- en
-
- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可