The Role of Growth Rates and Buffer Layer Structures for Quality Improvement of Cubic GaN Grown on GaAs.
-
- Ogawa Masahiro
- Department of Electronic Science and Engineering, Kyoto University, Kyoto 606-8501, Japan
-
- Funato Mitsuru
- Department of Electronic Science and Engineering, Kyoto University, Kyoto 606-8501, Japan
-
- Ishido Teruki
- Department of Electronic Science and Engineering, Kyoto University, Kyoto 606-8501, Japan
-
- Fujita Shizuo
- Department of Electronic Science and Engineering, Kyoto University, Kyoto 606-8501, Japan
-
- Fujita Shigeo
- Department of Electronic Science and Engineering, Kyoto University, Kyoto 606-8501, Japan
Bibliographic Information
- Other Title
-
- Role of Growth Rates and Buffer Layer Structures for Quality Improvement of Cubic GaN Grown on GaAs
Search this article
Abstract
Cubic GaN (c-GaN) layers are grown on GaAs(001) substrates by metalorganic vapor phase epitaxy. To attain high-quality c-GaN, we investigate growth conditions and buffer layer structures. It is found that by increasing the growth rate from 0.35 to 1.05 μm/h, the growth temperature region where the c-GaN composition reaches its maximum (90%) is shifted from 700–800ºC to 850–900ºC. Regarding the film properties, excitonic emission and high resistivity are realized with the faster growth rate. Subsequently, the c-GaN composition is improved by the use of a double buffer layer (DBL) structure instead of the conventional single buffer layer structure without degrading the achieved optical and electrical properties. The DBL structure preserves a relatively high c-GaN composition even in thick layers.
Journal
-
- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 39 (2A), L69-L72, 2000
The Japan Society of Applied Physics
- Tweet
Details 詳細情報について
-
- CRID
- 1390282681230446976
-
- NII Article ID
- 210000048578
- 110003928680
-
- NII Book ID
- AA10650595
-
- ISSN
- 13474065
- 00214922
-
- NDL BIB ID
- 4986255
-
- Text Lang
- en
-
- Data Source
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- Abstract License Flag
- Disallowed