Simulation of Phosphorus Diffusion Profiles with Different Phosphorus Surface Concentration at the Same Diffusion Temperature in Silicon.
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- Yoshida Masayuki
- Yoshida Semiconductor Laboratory, 2-2-37, Kusagae, Chuo-ku, Fukuoka 810-0045, Japan
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- Tanaka Shuji
- Fukuoka Institute of Technology, Wajiro-higashi, Higashi-ku, Fukuoka 811-0295, Japan
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Description
Four diffusion models based on the pair diffusion models of vacancy and interstitial mechanisms are adopted for the simulation of six experimental profiles of P surface concentration, CP<FONT SIZE="-1">+</FONT>s, from 3 × 1020 to 2.5 × 1018 cm-3 at 900°C. Values of fitting parameters are determined to simulate the profiles of CP<FONT SIZE="-1">+</FONT>s = 3 × 1020 and 2.5 × 1018 cm-3 well. Changing only CP<FONT SIZE="-1">+</FONT>s, other profiles are simulated. At high CP<FONT SIZE="-1">+</FONT>s, a large amount of excess I is generated. For the simulation of CP<FONT SIZE="-1">+</FONT>s = 3 × 1020 cm-3, it is necessary to control excess I. For the simulation of CP<FONT SIZE="-1">+</FONT>s < 3 × 1020 cm-3, the effect of a main parameter upon the control of excess I should decrease with decreasing CP<FONT SIZE="-1">+</FONT>s. Based on this, the decrease in quasi self-interstitial formation energy or the ratio of the diffusion coefficient of a negatively charged P-V pair to that of a neutral one is suitable for the main parameter. To decide the suitable main parameter, it is necessary to obtain a more accurate experimental profile, paying attention to whether or not the profile has a plateau.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 41 (9), 5493-5502, 2002
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390282681231668864
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- NII Article ID
- 210000051955
- 110006341763
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- NII Book ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL BIB ID
- 6305468
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed