Finite Element Method Simulation of Double-T Type Vibrators for Flatly Supported Piezoelectric Vibratory Gyro-Sensor.

  • Kikuchi Takayuki
    Graduate Program of Human Sensing and Functional Sensor Engineering, Yamagata University, 4-3-16 Jonan, Yonezawa, Yamagata 992-8510, Japan Corporate Technical Center, NGK Insulators, Ltd., 2-56 Mizuho-ku, Nagoya City, Aichi 467-8530, Japan
  • Tomikawa Yoshiro
    Graduate Program of Human Sensing and Functional Sensor Engineering, Yamagata University, 4-3-16 Jonan, Yonezawa, Yamagata 992-8510, Japan
  • Soma Takao
    Corporate Technical Center, NGK Insulators, Ltd., 2-56 Mizuho-ku, Nagoya City, Aichi 467-8530, Japan

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In this study we deal with a flexural vibrating resonator for flatly supported vibratory gyro-sensors in parallel with the rotating plane. This type of gyro-sensor uses two vibration modes in only one plane of single crystal quartz, and therefore can be constructed to be very stable under operating conditions. The double-T type vibrator that has two T-type resonating arms and two resonant arms is designed for improving the quality factor Q of both driving and detecting vibration modes for this vibratory gyro-sensor. The result of finite element analysis of the double-T type vibrators shows the small influence of its vibration mode with the support at the center of gravity of the vibrator.

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