アモルファス半導体とその応用

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  • Amorphous Semiconductors and their Application to Electronic Devices
  • アモルファス ハンドウタイ ト ソノ オウヨウ

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As amorphous materials are characterized by atomic disorder, amorphous semiconductors have unique electrical and optical properties such as localized states, mobility edges, states in the gap arising from structural defects, variable-range hopping conduction, and optical absorption. The properties of amorphous semiconductors depend on the deposition method and its deposition conditions because amorphous materials are in non-equilibrium state. While deposition methods using neutral radical species are well known, methods using ion species are recently being considered. Since the discovery of hydrogenated amorphous silicon with structural sensitivity, a new and wide field from basic science to applications to large-area electronic devices has been opened. The basic properties, deposition methods and applications of amorphous semiconductors, particularly hydrogenated amorphous silicon are summarized.

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