SAWデバイスによる腐食モニタリング

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タイトル別名
  • Corrosion Monitoring with Surface Acoustic Wave Devices
  • SAW デバイス ニ ヨル フショク モニタリング

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抄録

The application of SAW (surface acoustic wave) devices which can generate high frequencies for corrosion monitoring in both gaseous and liquid environments was studied. A 36°-roted Y cut X propergation LiTaO3 (36 LT) which can generates SH (shear horizontal displacement)-SAW was selected for piezoelectric substrate. By using this SAW device sensor with a center frequency of 104MHz, metal dissolution process of aluminum thin film in dilute HCl aqueous solution was monitored at room temperature in real time with a high degree of mass sensitivity (2ng/cm2/Hz). Further, the adsorption process of water on evaporated gold surface could be monitored in the atmospheric environment.

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