Infrared Near-field Micro-spectroscopy Using a Scanning Slit Probe.

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  • スリット・プローブを用いた赤外ニア・フィールド顕微分光法
  • スリット プローブ オ モチイタ セキガイ ニア フィールド ケンビ ブンコウ

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Abstract

We developed a near-field scanning optical microscope (NSOM) giving infrared spectra in an area smaller than the diffraction limit of the infrared light. The developed NSOM features a probe which is equipped with a slit aperture to improve the efficiency in collecting the near-field light. The illumination light is generated with a Michelson interferometer as an interference light and the transmission spectrum of sample at the local position is given through the slit of probe. The experimental results with a test chart and a two-layered film show that the spatial resolution of the IR-NSOM developed depends only on the slit width and not on the wavelength of the illumination light. The spatial resolution of the microscope has been numerically analyzed with finite-difference time-domain (FD-TD) method.

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