Diagnostical Measurements of an Ar-MIP with an Axially-Varied Bore Discharge Tube.

  • OKINO Akitoshi
    Department of Applied Physics, Faculty of Engineering, Osaka University
  • MIYATAKE Ken-ichiro
    Department of Applied Physics, Faculty of Engineering, Osaka University
  • MINAMI Shigeo
    Department of Applied Physics, Faculty of Engineering, Osaka University
  • UCHIDA Teruo
    Department of Physics, Faculty of Engineering, Setsunan University

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Other Title
  • ダブルボア放電管型MIP光源のプラズマ温度および電子密度の測定
  • ダブル ボア ホウデンカンガタ MIP コウゲン ノ プラズマ オンド オヨビ

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Abstract

The present study reports plasma temperatures and electron number densities for a Microwave Induced Plasma (MIP) source produced in an axially-varied bore discharge tube. Observed temperatures and electron number densities exhibit significant increase, but decrease of argon emission intensity, upon the aqueous sample introduction. Experimental results suggest that local thermodynamic equilibrium is not consistent and excitation and ionization of atomicspecies due to collision with high energy electron is dominant under the operating conditions employed for the measurements.

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