An Introduction to Chemical Vapor Deposition

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Other Title
  • CVD薄膜形成技術
  • CVD ハクマク ケイセイ ギジュツ

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Abstract

An outline of CVD (Chemical Vapor Deposition) technology is described. The CVD technology is widely used in semiconductor manufacturing process. The classification, features and applications of CVD are summarized.

Journal

  • CORROSION ENGINEERING

    CORROSION ENGINEERING 39 (10), 576-581, 1990

    Japan Society of Corrosion Engineering

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