Hybrid Method for the Evaluation of Mechanical Properties of Hard Film Deposited on Soft Substrate

DOI 1 Citations Open Access
  • Yonezu Akio
    Faculty of Science and Engineering, Aoyama Gakuin University
  • Cho Hideo
    Faculty of Science and Engineering, Aoyama Gakuin University
  • Ogawa Takeshi
    Faculty of Science and Engineering, Aoyama Gakuin University
  • Takemoto Mikio
    Faculty of Science and Engineering, Aoyama Gakuin University

Bibliographic Information

Other Title
  • 軟質基材に堆積された硬質膜の力学特性を評価するハイブリッド試験法

Description

We propose a new hybrid method for evaluating the fracture strength of the hard films deposited on soft substrate metal. The method utilizes acoustic emission (AE), corrosion potential fluctuation (CPF) data and Finite Element Method (FEM) analysis. Both the AE and CPF were simultaneously detected during the Vickers indentation test into the hard film (TiN) in a buffer solution (pH: 4.0 phthalic acid) and used for the determination of both the number and distance of ripple cracks. AE system detected Lamb wave signals from the Mode-I ripple cracks due to the tensile stress induced by the bending of the soft substrate (SUS 304). Event counts of rapid drop (RD-) type CPF with a large shift rate and AE signals agreed well with the number of ripple cracks. Non-linear FEM analysis revealed the Mode-I crack generation in the film at the slight outside of the contact boundary of the indenter and can predict the fracture strength of the film.

Journal

  • Corrosion Engineering

    Corrosion Engineering 54 (11), 532-537, 2005

    Japan Society of Corrosion Engineering

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Details 詳細情報について

  • CRID
    1390282681236798976
  • NII Article ID
    130004238940
  • DOI
    10.3323/jcorr1991.54.532
  • COI
    1:CAS:528:DC%2BD2MXht1GktrzI
  • ISSN
    18819664
    09170480
  • Data Source
    • JaLC
    • Crossref
    • CiNii Articles
    • OpenAIRE
  • Abstract License Flag
    Disallowed

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