Scroll vacuum pump.

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  • スクロール真空ポンプの研究
  • スクロール シンクウ ポンプ ノ ケンキュウ

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Abstract

Scroll machines have very good sealing characteristics, and the authors have attempted to develop a scroll vacuum pump. A rotating mechanism was employed instead of an orbiting mechanism from the point of view of load pattern and mechanical simplification. The axial and the radial sealing techniques were utilized. The radial sealing mechanism is particularly easy and effective due to the stationary seal line. A spiral with zero top clearance volume and a compact Oldham coupling were the other key technologies. Vacuums of 1 Pa (10-2 Torr) for dry operation, and of 10-2 Pa (10-4 Torr) for oil flooded operation were achieved at 1 800 rpm.

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