Sensitivity Enhancement by Sample Surface Coatings on Photothermal Metal Thin-Film Thickness Measurements

DOI Web Site Web Site Web Site 参考文献9件
  • Okamoto Yoshitsugu
    Department of Electrical Engineering and Electronics, Faculty of Engineering, Osaka Sangyo University
  • Yarai Atsushi
    Department of Electrical Engineering and Electronics, Faculty of Engineering, Osaka Sangyo University
  • Nakanishi Takuji
    Department of Electrical Engineering and Electronics, Faculty of Engineering, Osaka Sangyo University

この論文をさがす

抄録

An effective and stable method to enhance the sensitivity for photothermal measurements was proposed. The effectiveness of our method was proven by measuring the thickness of metal thin-film samples. It features sample surface coatings to improve the pumping beam’s absorption of the sample as well as radiation efficiencies from the sample. Two solutions, graphite and dye, were used as coating materials. As metal thin-film samples, aluminum films formed by vacuum deposition on sapphire substrate were used. The inclination of the line showing the relationship between detection signals to the aluminum film thickness (i.e. measurement sensitivity) with coatings is more than three times larger than without coatings. Resolution on the order of a few nm film thickness measurement was achieved by using this coating method for metal films whose thickness ranged from 0 to several hundred nm. The effectiveness of our method functions for other photothermal measurements.

収録刊行物

参考文献 (9)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ