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Additional Plasma Surface Texturing for Single-Crystalline Silicon Solar Cells Using Dielectric Barrier Discharge
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- Sakoda Tatsuya
- Department of Electrical System and Computer Engineering, Sojo University
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- Matsukuma Kunihiro
- Department of Electrical System and Computer Engineering, Sojo University
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- Sung Youl-Moon
- Department of Electrical and Electronic Engineering, Miyazaki University
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- Otsubo Kouji
- LSI and FPD Equipment Cleaning Group, Chinryo Corporation
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- Tahara Minoru
- LSI and FPD Equipment Cleaning Group, Chinryo Corporation
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- Nakashima Yoshihiro
- LSI and FPD Equipment Cleaning Group, Chinryo Corporation
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Description
To reduce the light reflection from surfaces of single-crystalline solar cells, a new surface texturing technique using a dielectric barrier discharge was proposed and examined on wet-textured surfaces of single-crystalline Si substrates. Minute uneven structures were additionally formed on the entire area of a wet-textured surface of pyramid-like shape. When the discharge voltage was 3.5 kV, the reflectance was less than 8% at wavelengths from 400 to 1000 nm and showed a minimum of 5.3% at 520 nm.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 44 (4A), 1730-1731, 2005
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390282681242502144
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- NII Article ID
- 10015470125
- 210000057574
- 130004533663
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- NII Book ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- Text Lang
- en
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
- OpenAIRE
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- Abstract License Flag
- Disallowed
