Raman Spectroscopic Characterization of Tetragonal PbZr<sub>x</sub>Ti<sub>1-x</sub>O<sub>3</sub> Thin Films: A Rapid Evaluation Method for c-Domain Volume
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- Nishida Ken
- Department of Electronic and Photonic Systems Engineering, Kochi University of Technology
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- Osada Minoru
- Advanced Materials Laboratory, National Institute for Materials Science (NIMS)
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- Wada Syunshuke
- Department of Electronic and Photonic Systems Engineering, Kochi University of Technology
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- Okamoto Shoji
- Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
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- Ueno Risako
- Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
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- Funakubo Hiroshi
- Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
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- Katoda Takashi
- Department of Electronic and Photonic Systems Engineering, Kochi University of Technology
書誌事項
- タイトル別名
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- Raman Spectroscopic Characterization of Tetragonal PbZrxTi1-xO3 Thin Films: A Rapid Evaluation Method for c-Domain Volume
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抄録
We present the use of Raman spectroscopy as a rapid and convenient evaluation tool for domain distribution of tetragonal PbZrxTi1−xO3 (PZT) thin films. From polarized Raman analyses of epitaxial PZT thin films with various c-domain volumes, we found that the intensity of the A1(TO) modes linearly scales with the c-domain volume. These observations, as well as the quick and nondestructive characteristics of this technique, clearly imply that Raman spectroscopy has enormous potential to quantify the fraction of c-domain volumes in a wide range of PZT devices.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 44 (24-27), L827-L829, 2005
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390282681242913280
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- NII論文ID
- 210000059671
- 10016590819
- 130004533403
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- NII書誌ID
- AA11906093
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 7356339
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 使用不可