Monte Carlo Simulation of Secondary Electron Emission from Rough Surface

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  • Ohya Kaoru
    Department of Electrical and Electronic Engineering, The University of Tokushima, Tokushima 770
  • Itotani Takayuki
    Department of Electrical and Electronic Engineering, The University of Tokushima, Tokushima 770
  • Kawata Jun
    Department of Information Engineering, Takuma National College of Technology, Mitoyo–gun, Takuma–cho, Kagawa 769–11

抄録

The surface roughness effect on the secondary electron yield, as well as the energy and angular distributions of emitted electrons, is investigated using a direct Monte Carlo simulation of the secondary electron emission from aluminum with a sinusoidal ripple surface. By introducing the roughness into the calculation, the electron yield for normal incidence increases. A low-energy shift of the energy distribution and an angular distribution, being different from the cosine distribution are calculated.

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