遠心焼結による厚膜プロセス

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タイトル別名
  • Thick Film Processing via Centrifugal Sintering
  • 受賞記念講演 平成18年度研究進歩賞 遠心焼結による厚膜プロセス
  • ジュショウ キネン コウエン ヘイセイ 18ネンド ケンキュウ シンポショウ エンシン ショウケツ ニ ヨル コウマク プロセス

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抄録

Constrained sintering, such sintering as thick films on rigid substrates, inherently involves the problem of macro-defect formation viz. crack and/or de-lamination. The origin of these defects lies in a mismatch of sintering shrinkage between different materials. To overcome the problem of film sintering, we have developed a novel sintering process, namely centrifugal sintering. The sintering is capable of applying the centrifugal acceleration of 100000 G during heating procedure. Due to the external pressure generated by centrifugal acceleration, shrinkage behavior of materials shows anisotropy: densification chiefly progresses along thickness direction of the film, while liner shrinkage along in-plane direction is limited. As a consequence, crack-free homogeneous microstructure is accomplished by the present process.

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