定盤加速度信号を用いたＸ‐Ｙステージ位置決め制御系の解析

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  • Analysis of an X-Y Stage Positioning System Using the Acceleration Signal of the Base Plate.

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In order to realize the higher throughput of semiconductor equipment, e.g. the reduction stepper, a higher-velocity X-Y stage must be developed. As for the realization of the high-speed X-Y stage, the selection of not only the driving method but also the guide mechanism for this stage are significant issues. As is well known, there are mechanical and noncontact guide systems. The former system cannot be precisely controlled due to the nonlinear friction, while the disturbance can be suppressed with the aid of the friction. On the other hand, in the case of the latter system, high-speed positioning can be expected due to the frictionless nature. Contrary to our expectation, this stage actually requires long settling time due to the lack of friction. Hence, in order to improve the positioning time, base-plate acceleration feedback was proposed as described in the literature, and the effect of disturbance rejection was experimentally demonstrated. However, an explanation for the theoretical background of its feedback was insufficient. This paper firstly shows the mathematical model of the X-Y stage including the base-plate dynamics and its validity as the control model is confirmed by comparing with the measured frequency responses. Next, based to the theoretical background using the model, the features of the positioning system with acceleration feedback, which play an important role in the suppression of disturbance, is clarified.

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