Development of Vibration-Driven MEMS Electret Power Generator for Energy Harvesting Application(<Special Issue>The 1st Symposium on Micro-Nano Engineering)

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  • MIKI Daigo
    Department of Mechanical Engineering, The University of Tokyo
  • HONZUMI Makoto
    Department of Mechanical Engineering, The University of Tokyo
  • SUZUKI Yuji
    Department of Mechanical Engineering, The University of Tokyo

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  • 環境発電に用いるMEMSエレクトレット振動発電器の開発(<小特集>第1回マイクロ・ナノ工学シンポジウム)
  • 環境発電に用いるMEMS エレクトレット振動発電器の開発
  • カンキョウ ハツデン ニ モチイル MEMS エレクトレット シンドウ ハツデンキ ノ カイハツ

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Abstract

A vibration-driven electret generator has been developed. By using parylene as the spring material, a high-aspect-ratio spring with low-resonant-frequency is realized. Large in-plane amplitude of 0.5mm at the resonant frequency as low as 63Hz has been achieved. Aprototype generator with a seismic mass of 11.6×10.2mm^2 is fabricated through MEMS technologies. Fluorinated amorphous polymer CYTOP is used as high-perfomance polymer electret material. With the present early prototype, we have obtained output power of 1μW at the resonant frequency of 63Hz.

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