直接慣性力制御を用いた多軸アクティブ消振・制振システムに関する研究(機械力学,計測,自動制御)

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タイトル別名
  • Study on Multi-Axis Active Vibration Canceling and Damping System Using Direct Inertia Force Control(Mechanical Systems)
  • 直接慣性力制御を用いた多軸アクティブ消振・制振システムに関する研究
  • チョクセツ カンセイリョク セイギョ オ モチイタ タジク アクティブショウシン セイシン システム ニ カンスル ケンキュウ

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抄録

Most of photolithography machines are used with active vibration isolation systems (AVI) in order to isolate photolithography machine from undesired vibration environment. However, conventional AVIs often give harmful reaction force to the floor on which the photolithography machine is installed, and the reaction force causes undesired floor vibration. In such background, we have developed an active vibration canceling system that can prevent undesired reaction force transmission from AVI's actuators to the floor. However, the system must have been used with AVI. In this study, to improve the cost performance, active vibration canceling and damping system (AVCD) was developed. The AVCD can realize good vibration canceling and damping performance without the AVI. Therefore, the system can be realized with low cost. In the AVCD, the control system is designed by the direct inertia force control (DIFC) which is proposed by authors. By using DIFC concept, various vibration control method can be easily implemented. This paper describes the design of the AVCD, and shows its performance evaluation results.

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