Development of an Active Vibration Canceling System Using Intertial Force Generators
-
- TAGAMI Masaharu
- Department of Mechanical System Engineering, Tokyo University of Agriculture and Technology
-
- YAMASHITA Tomoyuki
- Department of Mechanical System Engineering, Tokyo University of Agriculture and Technology
-
- TAGAWA Yasutaka
- Department of Mechanical System Engineering, Tokyo University of Agriculture and Technology
-
- YASUDA Masashi
- 特許機器 (株)
-
- HORA Hirokazu
- 特許機器 (株)
-
- ENDO Kenichi
- 特許機器 (株)
-
- NOGUCHI Yasuyuki
- 特許機器 (株)
Bibliographic Information
- Other Title
-
- 慣性力発生装置を用いたアクティブ消振システムの開発
Abstract
Recently, the density of components on precision devices such as semiconductors has been increasing. As a consequence, the acceptable vibration level of floors on which manufacturing equipment is installed is becoming smaller. Conversely, the vibration that is generated by manufacturing equipment is becoming larger because the size of manufacturing object is increasing. Active vibration isolation devices have been used to isolate equipment from floor vibration. However the vibration control force generated by active vibration isolation devices causes the floor vibration when they are used to isolate the large vibrations generated by manufacturing equipment. For such a background, a new vibration canceling system using an inertial force generator is developed in this research. In addition, effectiveness of the developed canceling system is confirmed by experiment.
Journal
-
- TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
-
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C 73 (735), 2948-2954, 2007
The Japan Society of Mechanical Engineers
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1390282681364196992
-
- NII Article ID
- 130004236512
-
- ISSN
- 18848354
- 03875024
-
- Text Lang
- ja
-
- Data Source
-
- JaLC
- Crossref
- CiNii Articles
-
- Abstract License Flag
- Disallowed