スパッタ金属膜によるき裂長さの測定

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タイトル別名
  • Crack Length Measurement with an Ion Sputtered Film
  • スパッタ キンゾク マク ニ ヨル キレツ ナガサ ノ ソクテイ

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Crack length measurement and crack initiation detection in a fatigue process are extremely important techniques in the researches for the investigation of crack growth characteristics and the fatigue strength evaluation of machine elements. The purpose of this research is to show a simple and high precision method to measure the length of a crack as well as a micro crack using an extremely thin ion sputtered film. A grid pattern ion sputtered film was proposed to measure the crack length for a bending test specimen. Based on the comparisons between the measurement results and that by a microscope, it was clarified that the grid pattern ion sputtered film has a very high measurement precision. This method should be invaluable and practicable for the crack length measurement of insulating materials such as ceramics. Meanwhile, a rectangle ion sputtered film was used on a metal bending specimen, the possibility to apply the film in the crack length measurement of a metal machine element was confirmed by the change of the electric resistance of the film with crack growth.

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